Presented at the 2011 International Conference on Hot Isostatic Pressing Kobe, Japan, 12-14 April 2011. Three kinds of TiN porous ceramics with different relative density (SN1: 87 %; SN2: 66 %; SN3: ...
The Altus DirectFill is a single system, multi-chamber approach for tungsten deposition, eliminating the need for conventional titanium/titanium nitride toolsets, the Silicon Valley tool vendor said.
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